He-Ne Laser Head
Part Number: BH3-3210-000V
Manufacturer: Canon
He-Ne Laser Head used as the light source during alignment of the wafer
High Durability Masking Blade Unit 3000 Series
Part Number: BG3-2898-000V
Manufacturer: Canon
Used on the Canon FPA3000 Series Systems. Note: The new, HD type units REQUIRE an MB 1-chip (located on the IL-1 PCB) version 2.0 or greater, otherwise they will not function properly (the blades will open and close, but not at the proper positions). (IMPORTANT NOTE: Consult your console software documentation to determine the required 1-chip version. For example, i4 software v4.08a requires an MB 1-chip of version 2.1 or higher)
HP Interface Computer (reflections)
Part Number: COMPUTER-002V
Manufacturer: Canon
HP Interface Computer (reflections)
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i-Line Filter (AA/FRA) i2/i3/i4/i5/iW
Part Number: BN9-6635-000V
Manufacturer: Canon
The small i-Line Filter used in the AA/FRA block located in the illuminator of the i2/i3/i4/i5/iW steppers