XY Stg Motor Coupler Old Style Motor 27mm
Part Number: BD4-4802-000V
Manufacturer: Canon
XY Stg Motor Coupler Old Style Motor 27mm
XY-Stage-Motor-Coupler-New-Style-Motor-(27mm)
Part Number: VEN-0074-000V
Manufacturer: Ventex
XY-Stage-Motor-Coupler-New-Style-Motor-(27mm)
Y ball screw (rolling type) i3
Part Number: BG4-4472-000V
Manufacturer: Canon
For Canon FPA2500i2/i3 Y stage
Z ball screw unit
Part Number: Y60-0812-000V
Manufacturer: Canon
Z ball screw unit which is field replaceable on the newer style Mk4, 2000i1, 2500i2/i3 & i4/iW tilt stages.
Zygo-Laser-Head-Model-7702
Part Number: BG3-6723-000V
Manufacturer: Canon
Zygo-Laser-Head-Model-7702