Fiber Sensor Type IV AF (Send Hand)
Part Number: BH5-7536-000V
Manufacturer: Canon
Needle Probe optical fiber. Used for wafer detection on the Type IV A/F Send hand units.This is the long length fiber sensor.
Glass Cover Sheet (Lower)
Part Number: Y60-1010-020V
Manufacturer: Canon
Used in the FPA3000 Series Systems
Glass cover sheet (upper)
Part Number: BN9-7775-000V
Manufacturer: Canon
Glass cover sheet found in the FPA3000 series systems