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Canon Stepper Spare Parts

Largest inventory of spare parts for Canon Steppers

Spare Parts for FPA-3000 Canon Steppers

Part NumberDescriptionMachine Type
BN9-7513-000Iline filter 3000 seriesFPA-3000i4,iW,i5,I5+
BN9-6634-000Sub iline filter AA/FRAFPA-3000i4,iW,i5,I5+
BN9-6635-000Iline filter AA/FRAFPA-3000i4,iW,i5,I5+
Y60-1010-020Glass cover sheet (lower)FPA-3000i4,iW,i5,I5+
BN9-7775-000Glass cover sheet (upper)FPA-3000i4,iW,i5,I5+
Y60-0862-0001st condenser lens (lamp 1)FPA-3000i4,iW,i5,I5+
Y60-0863-0001st condenser lens (lamp 2)FPA-3000i4,iW,i5,I5+
BG4-6690-0001st condenser lens (main)FPA-3000i4,iW,i5,I5+
Y60-1221-0002nd condenser zoom lensFPA-3000i4,i5,I5+
Y60-0908-0002nd condenser zoom lensFPA-3000iW
Y60-0869-0002nd condenser lens fixedFPA-3000i4
Y60-1032-0002nd condenser lens fixedFPA-3000i5
BG3-2071-0002nd condenser lens fixed C typeFPA-3000i5,i5+
BG3-2072-0002nd condenser lens fixed B typeFPA-3000i5,i5+
BG3-2073-0003rd condenser lens fixed A typeFPA-3000i5,i5+
Y60-1301-0003rd condenser lens w/ lens capFPA-3000i4,i5,I5+
Y60-1375-0003rd condenser lens w/ lens capFPA-3000iW, MR
BN9-2310-000Multi stopper switching unit FPA-3000i4,i5,I5+
BG4-5450-000Exposure shutter unit FPA-3000i4,iW,i5,I5+
BG4-6703-000Masking blade unitFPA-3000i4,iW,i5
BG3-2898-000Masking blade unit (H.D.)FPA-3000i4,iW,i5,I5+
BG4-6697-001Ushio Mercury Lamp FPA-3000i4,iW,i5,I5+
BG4-6453-000Theta/Z tilt unitFPA-3000i4iW
Y60-2160-000Tilt piezo unitFPA-3000i4iW
BG4-5422-000Theta piezo unitFPA-3000i4iW
Y75-6904-000Pin theta cableFPA-3000EX5,i5
Y75-6905-000Wafer theta junction cableFPA-3000EX5,i5
Y60-1478-000Robot unit SCH (L)FPA-3000i4,iW,i5,I5+
Y60-2071-000Robot unit SCH (R)FPA-3000i4,iW,i5,I5+
BG4-8632-0006in low contact pin chuck (flat)FPA-3000i4,iW,i5,I5+
BG3-5879-000 (BG3-2616-000)8in low contact pin chuck (notch)FPA-3000i4,iW,i5,I5+
BN9-2310-0004% ND filterFPA-3000i4,iW,i5,I5+
BN9-2311-0006% ND filterFPA-3000i4,iW,i5,I5+
BN9-2457-00010% ND filterFPA-3000i4,iW,i5,I5+
BH5-4221-000X Terminal unit (mono)FPA-3000i4,iW,i5
BG3-2247-000X Terminal unit (color)FPA EX5,i5+
BG4-6736-000Cassette Robot FPA-3000i4,iW,i5,I5+
BG4-6735-000Reticle RobotFPA-3000i4,iW,i5,I5+
BH5-3768-000UPS unit Fuji DenkoFPA-3000i4,iW,i5,I5+
BG4-6996-000MO drive unitFPA-3000i4,iW,i5,I5+
BG4-6765-0006-8in SCH ceramic handFPA-3000i4,iW,i5,I5+
BG4-6764-0003-4in SCH ceramic handFPA-3000i4,iW,i5,I5+
BD4-7683-0006in PA unit (flat)FPA-3000i4,iW,i5,I5+
BD4-7782-0004-5in PA unit (flat)FPA-3000i4,iW,i5,I5+
 8in PA unit (notch)FPA-3000i4,iW,i5,I5+
BG4-6823-000WF CPU PCBFPA-3000i4,iW,i5,I5+
BG4-6746-000WF/RC IF PCBFPA-3000i4,iW,i5,I5+
BG4-6745-000RC CPU PCBFPA-3000i4,iW,i5,I5+
BG4-6628-000CAM unit PCBFPA-3000i4,iW,i5,I5+
BG9-3501-000IMP-2 IF PCBi1,i3,i4,iW,i5
BG9-3500-000ADP-2 PCBi1,i3,i4,iW,i5
BG4-5628-000Main CPU PCBFPA-3000i4,iW,i5,I5+
BG4-5631-000CD IF PCBFPA-3000i4,iW,i5,I5+
BG4-5629-000XY Stage CPU PCBFPA-3000i4,iW,i5,I5+
BG4-6456-000Stage DSP CPU PCBFPA-3000i4,iW,i5,I5+
BG4-6457-000XY Pre Amp PCBFPA-3000i4,iW,i5,I5+
BG4-5459-000Piezo Drive PCBFPA-3000i4,iW
BG4-5460-000Piezo Analog PCBFPA-3000i4,iW
BG4-6601-000D Rack Power Supply FPA-3000i4,iW
BG4-6465-000Measurement PCB (X)FPA-3000i4,iW,i5
BG4-6466-000Measurement PCB (Y)FPA-3000i4,iW,i5
BG4-6467-000Measurement PCB ()FPA-3000i4,iW,i5
BG4-9175-000MLE IF PCBFPA-3000i5,i5+
BG4-9151-000FZANA IF PCBFPA-3000i5,i5+
BG4-7082-000Mercury Lamp Power SupplyFPA-3000i4,iW,i5,I5+
BG3-5372-020Zygo HeNe Laser HeadFPA-3000i4,iW,i5,I5+
BG4-9171-000D Rack Power Supply FPA-3000i5,i5+
BG3-3521-000FZANA 2 PCBFPA-3000i5,i5+
BG3-1407-000IP PCBFPA-3000EX4,EX5,i5+

Spare Parts for MKiV-i3

Part NumberDescriptionMachine Type
BG4-6198-000Tilt Stage Uniti2,i3
Y60-0812-000Z ball screw uniti1,i3,i4,iW
BG4-3601-000Tilt Stage UnitMKIV, i1
BG4-2593-000Y ball screw (rolling type)MKIV,i1
BG4-2592-000X ball screw (rolling type)MKIV,i1
BG4-4472-000Y ball screw (rolling type) i3i2,i3
BG4-4471-000X ball screw (rolling type) i3i2,i3
Y60-0596-000Y Stage motorMKIV,i1,i2,i3
Y60-0595-000X Stage motorMKIV,i1,i2,i3
BD4-4802-00027mm coupler (old style)MKIV,i1,i2,i3
BD4-4805-00032mm coupler (old style)MKIV,i1,i2,i3
BG4-4806-00042mm coupler (old syle)MKIV,i1,i2,i3
BH2-8006-000Cassette Robot RCi2,i3
BH2-8005-000Reticle Robot RCi2,i3
Y60-0941-000SCH Robot Type IV AFi2,i3
BF6-2340-000SCH ceramic hand (4" - 5")i2,i3
BF6-2042-000SCH ceramic hand (6" - 8")i2,i3
BG4-5164-000USM motor PAi2,i3
BF6-2341-000Feed unit ceramic hand (4" - 5")i2,i3
BF6-2043-000Feed unit ceramic hand (6" - 8")i2,i3
BG4-3624-000USM motor Feed handi2,i3
BN9-7269-000iline filter C (i3)i2,i3
Y60-0794-0001st condenser lens Di2,i3
Y60-0793-0001st condenser lens Ci2,i3
BG4-6711-0002nd condenser zoom lens (i3)i3
BG4-2022-000Mercury lamp i1,i2,i3
Y60-0671-000iline filter A (i1)i1
Y60-0672-000iline filter B (i1)i1
BN9-6211-000iline filter AA/FRAi1
BN9-6210-000Sub-iline fitler AA/FRAi1
Y60-0771-0001st condenser lensi1
BG4-7874-0002nd condenser lens Ai1
Y60-1255-0002nd condenser lens AAi1
Y60-1256-0002nd condenser lens AAi1
BG4-5918-000Exposure Shutter i2,i3
BG4-2020-000Exposure Shutter i1
BG9-3621-000Exposure Shutter MKIV
Y60-0916-0001st condenser lensMKIV
BN9-5759-000Half Mirror AMKIV
BN9-5754-000Half Mirror BMKIV
BH3-3210-000HeNe Laser Head MKIV,i1,i2,i3,i4,i5,i5+
BH5-3277-000HeNe laser power supplyMKIV,i1,i2,i3,i4,i5,i5+
BG9-3624-000HP Laser Model 5517BMKIV,i1
 4" ceramic pin chuck (flat)MKIV,i1,i2,i3
 6" ceramic ring chuck (flat)MKIV,i1,i2,i3
 6" ceramic pin chuck (flat)MKIV,i1,i2,i3
 8" ceramic ring chuck (notch)i1,i2,i3
 8" ceramic pin chuck (notch)i1,i2,i3

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San Jose, California 95131 USA
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