Canon FPA-3000i4/i5/iW
The Canon FPA-3000i4 integrates a 5:1 reduction ratio i-Line lens (365nm) with a NA0.60 and resolution of 0.35µm along with a 22mm x 22mm image field. Features include a 6-inch or optional 5-inch high speed reticle changer, high speed air bearing XY stage and backside handling automatic wafer feeder. The system has in-Line and on-Line capabilities and can handle up to 8-inch wafers. The stepper incorporates a 5-point CCD die-by-die wafer leveling function and a TV image processing wafer alignment utilizing He-Ne light or broadband halogen light.
The Canon FPA-3000i5 integrates a
5:1 reduction ratio i-Line lens
(365nm) with a variable NA0.63/0.45
and resolution of 0.35µm along with
a 22mm x 22mm image field.
Features include a 6-inch or
optional 5-inch high speed reticle
changer, high speed air bearing XY
stage and backside handling
automatic wafer feeder. The system
has in-Line and on-Line capabilities
and can handle up to 8-inch wafers. The stepper incorporates a 5-point CCD die-by-die wafer leveling function and a TV image processing wafer alignment utilizing He-Ne light or broadband halogen light.
The Canon FPA-3000iW integrates a 2:1 reduction ratio i-Line lens (365nm) with a variable NA0.24 and resolution of 0.80µm along with a 50mm x 50mm image field. Features include a 6-inch or optional 5-inch high speed reticle changer, high speed XY stage and backside handling automatic wafer feeder. The system has in-Line and on-Line capabilities and can handle up to 8-inch wafers. The stepper incorporates a 5-point CCD die-by-die wafer leveling function and a TV image processing wafer alignment utilizing He-Ne light or broadband halogen light.