Canon FPA-2000i1
The Canon FPA-2000i1 integrates a 5:1 reduction ratio i-Line lens (365nm) with a NA0.52 and resolution of 0.5µm along with a 20mm x 20mm image field. Features include a high speed reticle changer, high speed XY stage and backside handling automatic wafer feeder. The system has in-Line and on-Line capabilities and an 8-inch wafer handling kit is available as an option. The stepper incorporates a 5-point die-by-die wafer leveling function and TV image processing wafer alignment utilizing He-Ne light or broadband halogen light.