Canon Stepper & Custom Wafer Chucks

Ventex offers several different types of wafer chucks for the Canon stepper. We also manufacture custom designed chucks for other industries and markets to fulfill specific customer requirements and tolerances.

Canon Stepper Wafer Chucks
Ventex provides two different styles of wafer chucks for the Canon stepper, the Ring Chuck and the Pin Chuck. These are manufactured as direct replacements of the OEM wafer chucks at a significant cost reduction to the customer. Ventex wafer chucks maintain a flatness of less than 0.5 microns and a parallelism of less than 0.8 microns. We manufacture them in several different sizes, material and for the various stepper models.

While the Ring Chuck will meet most customer requirements, the Pin Chuck offers a significant decrease in the surface contact area on the wafer backside.

This enables the customer to realize many benefits:

  • Minimizes effects of backside particle contamination of the wafer
  • Drastically decreases incidents of hotspots (local defocused area)
  • Provides for better product yield
  • Less hotspots and vacuum errors means increased equipment availability

Stepper Models: MkIII/IV, 2000i1, 2500i2/i3

Stepper Models: 3000 series

Custom Designed Vacuum Chucks
Ventex has applied its’ chuck manufacturing expertise to produce many types of chucks for varying types of equipment and uses.

Utilizing our engineering and design knowledge, Ventex can provide custom chuck designs and engineering solutions for other types of equipment and industries. Contact us with your requirements.

  View inquiry list | Send price inquiry
  Catalog quick search