X ball screw (rolling type) i3

Part Number: BG4-4471-000V

Manufacturer: Canon

X ballscrew unit for Canon i2/i3 systems

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X-Stage Motor (200mm)

Part Number: Y60-0595-000V

Manufacturer: Canon

X-Stage Motor (200mm)

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X-Stage-Ball-Screw

Part Number: BG4-2592-000V

Manufacturer: Canon

X-Stage-Ball-Screw

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X-Stage-Ball-Screw

Part Number: BG4-2493-000V

Manufacturer: Canon

X-Stage-Ball-Screw

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XY Measurement PCB (Type X)

Part Number: BG4-6465-000V

Manufacturer: Canon

XY Measurement PCB (Type X)

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XY Measurement PCB (Type Y)

Part Number: BG4-6466-000V

Manufacturer: Canon

XY Measurement PCB (Type Y)

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XY Measurement PCB Type Q

Part Number: BG4-6467-000V

Manufacturer: Canon

XY Measurement PCB Type Q

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XY Pre Amp PCB

Part Number: BG4-6457-000V

Manufacturer: Canon

XY Pre Amp PCB

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XY Stage CPU PCB

Part Number: BG4-5629-000V

Manufacturer: Canon

XY Stage CPU PCB

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XY Stage CPU PCB

Part Number: BG9-3727-000V

Manufacturer: Canon

XY Stage CPU PCB

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