Canon FPA-2500i2

FPA-2500i2 specification
The Canon FPA-2500i2 integrates a 5:1 reduction ratio i-Line lens (365nm) with a NA0.54 and resolution of 0.45µm along with a 22mm x 22mm image field. Features include a 6-inch or optional 5-inch high speed reticle changer, high speed XY stage and backside handling automatic wafer feeder. The system has in-Line and on-Line capabilities and can handle up to 8-inch wafers. The stepper incorporates a 5-point CCD die-by-die wafer leveling function and a TV image processing wafer alignment utilizing He-Ne light or broadband halogen light.